Описание

автоматика:
CLT Series (Compact-ALT) SUPER-ALT Series
Helium Recovery
Helium Recovery and Recharging Systems
Sputtering
SPH Series (Load-Lock)
Vacuum Brazing / Heat Treatment
FHH Series (Brazing)
FHHn Series (Heat Treatment)
FHB-60C (Batch Type)
FB Series (Brazing)


семикнодукторы:
Entron-EX2 W300 for Depositon
Entron N300 for 300mm NVM Etching
Magest S200 for Magnetic Films
ULHITE NE-7800H for NVM Etching

насосы:
PRC-A/PMB-C(M) Series
MBS Series Mechanical Booster Pump
PMB Series Ver. D
Diaphragm Type, DAP/DA/DAT Series
High Vacuum Type, DAU/DTU Series
Anti-Corrosion Type, DTC Series
Rocking Piston Type, DOP Series
Scroll Type, DIS/DISL Series
LR/HR/UR Series Dry Pumps
Eco-Shock Power Saving Attachment
CR Series Dry Vacuum Pump
GR Series Dry Vacuum Pump
PBL Series, High Inlet Pressure Application
PFL Series, High Pumping Speed Applications
ULK Series, High Backing Pressure Applicatons




турбо-молекулярный насос:
UTM-FH/FW Series, Compound Type
UTM Series, High Velocity Revolution


Cryo Cooler:
UR4K03 Series
ионно-распылительный насос:
PST-030CU/AU
PST-050CU/AU
PST-100CX/100AX